- DC, RF, pulsed bipolar magnetron sputtering deposition units:
- ORION – AJA UHV deposition unit
- OXI – AJA UHV deposition unit
- Octogon deposition unit
- Rectangular magnetron deposition unit
- Cathodic vacuum arc
- Pulsed laser deposition PLD2000
- Spin Coater Laurell 650for sol-gel deposition
- Thermal / electron-beam deposition evaporation unit
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